Discriminative feature selection based on imbalance SVDD for fault detection of semiconductor manufacturing processes
- First Author: Wang Jian
- Correspondence Author: Feng Jian
- Co author: Han Zhiyan
- Title of Paper: Discriminative feature selection based on imbalance SVDD for fault detection of semiconductor manufacturing processes
- Journal: Journal of Circuits, Systems and Computers
- Issue: 11
- Volume: 25
- Indexed by: SCI检索
- Translation or Not: No
