Title of Paper:Yu Tianbiao*, Wang Zhihui, Guo Xuepeng, Xue Pengfei, Zhao Ji, Chen Lijie. Effect of ultrasonic vibration on polishing monocrystalline silicon: surface quality and material removal rate [J]. The International Journal of Advanced Manufacturing Technology, 2019, 103(5-8):2109-2119.
Translation or Not:No