Project Name:MEMS晶圆级封装的高粘度光刻胶直接雾化与共形涂膜机理研究
Project Source:国家自然科学基金项目（面上）
Project Level:面上项目
Project Number:62674040
Date of Project Approval:2026-09-01
Scheduled Completion Time:2030-12-31
Date of Project Completion:2030-12-31
张磊
Professor
Research Projects
MEMS晶圆级封装的高粘度光刻胶直接雾化与共形涂膜机理研究
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