张磊
Professor
Scientific Research
Research Field
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Paper Publications
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Zhang Lei*Atomized Droplets Separation Dynamics in a Cyclone Separator.Industrial & Engineering Chemistry Research,2026,65(17):9001-9012
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Zhang Lei*Non-contact droplet breakup induced by acoustic potential wells.Ultrasonics,2026,164:108021
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Zhang Lei*Airflow-assisted acoustic spray coating for suppressing pinhole defects on photoresist film.Materials Science in Semiconductor Processing,2025,196:109657
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Zhang Lei*Multi-jet breakup based monodisperse droplet generator with extended jetting patterns.Chemical Engineering Journal,2025,519:164836
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张磊,The microparticles adhesion and removal dynamics in wafer-scale physical cleaning process.Physics of Fluids,2025,37(2):023318
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张磊*Photoresist Spray Coating on Silicon Wafers With Acoustic Resonate Atomization.IEEE Transactions on Semiconductor Manufacturing,2024,37(4):576-582
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Zhang Lei,Multi-layer Uniform Photoresist Coating on Silicon Wafers via Spin-Coupled Inkjet Printing.IEEE Transactions on Components, Packaging and Manufacturing Technology,2025,15(4):821-829.
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Zhang Lei*Acoustic modulation and non-contact atomization of droplets based on the Fabry–Pérot resonator.Lab on a Chip,2024, 24(9):2418-2427
Patents
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Published Books
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