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Multi-layer Uniform Photoresist Coating on Silicon Wafers via Spin-Coupled Inkjet Printing

Release Time:2024-07-26| Hits:

First Author:Zhang Lei

Title of Paper:Multi-layer Uniform Photoresist Coating on Silicon Wafers via Spin-Coupled Inkjet Printing

Journal:IEEE Transactions on Components, Packaging and Manufacturing Technology

Issue:4

Volume:2025,15

Page Number:821-829.

Translation or Not:No

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