5. Heping Chen, Hongtai Cheng, Ben Moorings, Harold Stern. Improving Wafer Handling Performance in Semiconductor Manufacturing, Industrial Robots: an International Journal, 40(5), 425 – 432, 2013 doi: 10.1108/IR-09-2012-414 (IF=0.603, 000325040100003)
Release time:2023-08-15 Hits:
Pre One:6. 程红太, 张晓华. 基于虚约束的Acrobot动态伺服控制统一设计方法. 控制与决策, 2012, 27 (6): 923-928.(EI: 20123415365437)
Next One:4. Heping Chen, Hongtai Cheng, Ben Moorings, Harold Stern. Eccentricity estimation with error modeling in dynamic wafer handling. The International Journal of Advanced Manufacturing Technology, 68(1-4), 425-233, March 2013 doi: 10.1007/s00170-013-4740-4 (IF=1.103, 000323105600035)
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