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张磊
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Research Projects
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MEMS晶圆的光刻胶精细雾化与涂胶显影制程
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Supported by:
辽宁省应用基础研究计划
Date of Project Completion:
2024-06-01
Date of Project Initiation:
2022-06-01
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集成电路先进制程用高产能物理清洗机研制
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晶圆搬运机械手智能化系统开发与验证