东北大学主页平台 Zhang Lei--Home--Paper Publications

Paper Publications

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[1] Zhang Lei,The microparticles adhesion and removal dynamics in wafer-scale physical cleaning process.Physics of Fluids,2025,37(2):023318
[2] Zhang Lei*Photoresist Spray Coating on Silicon Wafers With Acoustic Resonate Atomization.IEEE Transactions on Semiconductor Manufacturing,2024,37(4):576-582
[3] Zhang Lei,Multi-layer Uniform Photoresist Coating on Silicon Wafers via Spin-Coupled Inkjet Printing.IEEE Transactions on Components, Packaging and Manufacturing Technology,2025,15(4):821-829.
[4] Zhang Lei*Acoustic modulation and non-contact atomization of droplets based on the Fabry–Pérot resonator.Lab on a Chip,2024, 24(9):2418-2427
[5] Zhang Lei*Acoustic-streaming driven liquid filling patterns inside through-glass vias.Physics of Fluids,2024, 36(7):073301
[6] Zhang Lei*Longitudinal transducer based membrane resonant ejector for high-viscosity and high-frequency micro-droplet jetting.Sensors and Actuators A: Physical,2024, 374,115480
[7] Zhang Lei*Inkjet Printing Photoresist with Ultralow Viscosity on Silicon Wafers for Uniform Coating.Langmuir,2024, 40(21):11125-11133
[8] Zhang Lei,Mesoscopic modeling of silver particles melting process on silicon wafer in inkjet-printed solar cell metallization.Computers and Mathematics with Applications,2024, 156:56-63.

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Paper Publications

[1] Zhang Lei,The microparticles adhesion and removal dynamics in wafer-scale physical cleaning process.Physics of Fluids,2025,37(2):023318

[2] Zhang Lei*Photoresist Spray Coating on Silicon Wafers With Acoustic Resonate Atomization.IEEE Transactions on Semiconductor Manufacturing,2024,37(4):576-582

[3] Zhang Lei,Multi-layer Uniform Photoresist Coating on Silicon Wafers via Spin-Coupled Inkjet Printing.IEEE Transactions on Components, Packaging and Manufacturing Technology,2025,15(4):821-829.

[4] Zhang Lei*Acoustic modulation and non-contact atomization of droplets based on the Fabry–Pérot resonator.Lab on a Chip,2024, 24(9):2418-2427

[5] Zhang Lei*Acoustic-streaming driven liquid filling patterns inside through-glass vias.Physics of Fluids,2024, 36(7):073301

[6] Zhang Lei*Longitudinal transducer based membrane resonant ejector for high-viscosity and high-frequency micro-droplet jetting.Sensors and Actuators A: Physical,2024, 374,115480

[7] Zhang Lei*Inkjet Printing Photoresist with Ultralow Viscosity on Silicon Wafers for Uniform Coating.Langmuir,2024, 40(21):11125-11133

[8] Zhang Lei,Mesoscopic modeling of silver particles melting process on silicon wafer in inkjet-printed solar cell metallization.Computers and Mathematics with Applications,2024, 156:56-63.