Paper Publications

Home - Scientific Research - Paper Publications

Multi-layer Uniform Photoresist Coating on Silicon Wafers via Spin-Coupled Inkjet Printing

Hits:

First Author:Zhang Lei

Journal:IEEE Transactions on Components, Packaging and Manufacturing Technology

Issue:4

Volume:2025,15

Page Number:821-829.

Translation or Not:no

Pre One:
Acoustic-streaming driven liquid filling patterns inside through-glass vias
Next One:
Inkjet Printing Photoresist with Ultralow Viscosity on Silicon Wafers for Uniform Coating
NO. 3-11, Wenhua Road, Heping District, Shenyang, P. R. China
Copyright 2020 Northeastern University | 110819 | 辽ICP备11009868号-3 | 85590@mail.neu.edu.cn

Official Website   |   Campus Network Service Website      MOBILE Version

Mobile phone sweep

Click: Times

Open time:--

The Last Update Time:--