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Photoresist Spray Coating on Silicon Wafers With Acoustic Resonate Atomization

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Correspondence Author:Zhang Lei

Journal:IEEE Transactions on Semiconductor Manufacturing

Issue:4

Volume:2024,37

Page Number:576-582

Translation or Not:no

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The microparticles adhesion and removal dynamics in wafer-scale physical cleaning process
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Multi-layer Uniform Photoresist Coating on Silicon Wafers via Spin-Coupled Inkjet Printing
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