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张磊

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教授
博士生导师
硕士生导师
- 教师拼音名称:Zhang Lei
- 出生日期:1981-03-18
- 电子邮箱:6e31e02ad0a5116f09e254a4fe7cfbd4629755c755da13f47ed2522c6e3efcb4c09927d58b23dadbd58957bf492cd460c0739b7fdac5e2faf37b7e7be45a62e23afc3be19744758bb5b0e5606da6f72d5656a2937bb5def1187505239c918fabbf8332efbb01c5fb80fc3dcdd6e186f65dbe29abbb67123b237b3822ca9f7ab2
- 入职时间:2019-04-09
- 办公地点:南湖校区新机械楼539
- 学位:博士
- 在职信息:在职
- 毕业院校:中国科学院大学
- 2022-06曾获荣誉当选:辽宁省技术发明二等奖
- 2018-08曾获荣誉当选:辽宁省自然科学学术成果奖
访问量:
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张磊,The microparticles adhesion and removal dynamics in wafer-scale physical cleaning process.Physics of Fluids,2025,37(2):023318
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张磊*Photoresist Spray Coating on Silicon Wafers With Acoustic Resonate Atomization.IEEE Transactions on Semiconductor Manufacturing,2024,37(4):576-582
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Zhang Lei,Multi-layer Uniform Photoresist Coating on Silicon Wafers via Spin-Coupled Inkjet Printing.IEEE Transactions on Components, Packaging and Manufacturing Technology,2025,15(4):821-829.
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Zhang Lei*Acoustic modulation and non-contact atomization of droplets based on the Fabry–Pérot resonator.Lab on a Chip,2024, 24(9):2418-2427
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Zhang Lei*Acoustic-streaming driven liquid filling patterns inside through-glass vias.Physics of Fluids,2024, 36(7):073301
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Zhang Lei*Longitudinal transducer based membrane resonant ejector for high-viscosity and high-frequency micro-droplet jetting.Sensors and Actuators A: Physical,2024, 374,115480
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Zhang Lei*Inkjet Printing Photoresist with Ultralow Viscosity on Silicon Wafers for Uniform Coating.Langmuir,2024, 40(21):11125-11133
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Zhang Lei,Mesoscopic modeling of silver particles melting process on silicon wafer in inkjet-printed solar cell metallization.Computers and Mathematics with Applications,2024, 156:56-63.