实验环境

   真空薄膜器件研究组隶属于东北大学真空与流体研究中心。
   本组现有匀胶机、 恒温水浴锅、恒温磁力搅拌器、电化学工作站、精密电子天平、超声波清洗机等仪器设备及实验所需的相关仪器和材料。
   研究所现有超高真空薄膜器件制备测试系统、超高真空磁控溅射与离子束联合溅射系统、多弧-陶瓷阴极枪离子镀膜设备、PECVD镀膜机、超高真空退火炉；氦质谱检漏仪等仪器设备；所在大学具有JEM-2010高分辨透射电镜；HF-2000冷场发射枪透射电镜；TECNAI F30冷场发射枪透射电镜；Talysurf CCI白光干涉表面轮廓仪及扫描隧道显微镜等相关设备。
   本组已与校内材料与冶金学院材料系秦高梧教授研究组及理学院化学系刘晓霞教授建立长期合作关系，目前正在与秦教授研究组进行感应耦合等离子射频溅射装置性能改进的合作研究。
   在校外合作方面，本组与中国科学院沈阳科学仪器研制中心有限公司、中科院金属所等相关单位有着长期合作关系，此外与上海交通大学微纳技术研究中心、北京大学物理电子学实验室及中科院化学所有机固体实验室保持着长期密切的合作关系。
   国外科研合作方面，目前我们与丹麦大学化学系、澳大利亚皇家理工大学电子学系等有项目合作研究。

Experimental Situations

    Lab of vacuum and thin film device is a part of Institute of Vacuum  and Fluid Research Center of Northeastern University located at Shenyang (China).
                 Our lab is equiped with some good experimental instruments such as scanning probe microscope (SPM) with capabilities of STM, AFM, CAFM, CFM and MFM, thermostat  water bath, magnetic stirrer, electrochemistry  workstation, electronic analytical balance, ultrasonic cleaner and  etc. We also have other related experimental materials and labwares. This provides a suitable basis for research on molecular electronics, thin films and devices etc.
                 Our institute has  large experimental instruments such as Ultrahigh Vacuum Thin Film Preparation Test  System，Ultrahigh Vacuum Magnetron Sputtering and Ion Beam Sputtering  System, PECVD Film Coating Machine，Ultrahigh Vacuum Annealing Oven，Helium Mass Spectrometer  Leak Detector and etc.
                 Our university  has JEM-2010 High Resolution Electron Microscope，Talysurf CCT White-light Interference  Surface Contour Analyzer，Scanning Tunnel Microscope  (STM) and other equipments.
                 On the intramural  cooperation, our lab has established longterm collaboration with professors Qin  Gaowu and Liu Xiaoxia, who are faculties in the departments of materials  science and chemistry, respectively. Now，we are co-working with the  lab of Prof. Qin in improving the performance of inductively coupled plasma RF  sputtering equipment.
               We also have established long-term cooperation  with SKY Technology Development Co.,Ltd., Chinese Academy  of Science and Institute of Metal Research Chinese Academy of Sciences. Furthermore,  we maintain long-term friendly cooperation with Research Institute of  Micro/Nano Science and Technology in Shanghai  Jiao Tong  University, physical electronics laboratory  of Peking University  and Laboratory of Organic Solids Institute of Chemistry Chinese Academy of Science and etc.

本所有真空工程与技术专业学生教学科研训练所需的相关装置与系统，以下为大三学生简单初步真空系统设计组装训练过程部分照片，由邵思佳等同学所拍摄。